Quorum Q150R ES Coater
An automatic rotary pumped coating system, suited for scanning electron microscopy (SEM) specimen preparation, when conductive thin film (representative of the surface topography) coating is required. The film coating inhibit charging, reduces thermal damage, and enhance secondary electron emission.
The instrument is fully adaptable to a wide range of specimens and offers easy loading and unloading of samples. The changeover between sputtering and evaporation inserts is simple. The system is fully automated with a user defined profile controlling the pumping sequence, preheating, outgassing, the time and number of evaporation/sputter bursts, and the current used during the process. It is equipped with a film thickness monitor (FTM), which measures the coating thickness on a crystal in the chamber, to control the coating applied to the sample.
- Sputter for noble metals coating (gold, palladium)
- Carbon rod evaporator for carbon coating