Zeiss Sigma HD High Definition Field Emission Scanning Electron Microscope (FE-SEM) (including STEM and EDS detectors)

Image acquisition in Scanning electron microscope (SEM) is performed by scanning a surface of the sample with a focused beam of accelerated electrons. The interaction of the electrons with atoms in the sample produces various signals that contain information about the surface topography and composition and are recognized by different detectors. The possible resolution is down to 1 nm. 


In-lens – mainly for acquisition of high contrast images of surface structure

ET-SE – mainly for acquisition of topography

STEM – for transmission imaging of thin sections of biological and mineralogical samples

EDS – for characterization of the elemental composition


Application Conditions

Acceleration Voltage: 100V – 20kV

Working Distance:       Less than 10mm

Vacuum mode:            High vacuum



10x to 1,000,000x


Specimen chamber and stage

Chamber dimensions: 330 mm inner diameter, 270 mm height

Stage type: 5-axis motorized Cartesian

Specimen weight: up to 0.5 kg tilted, up to 2 kg not tilted

Stage movement: X/Y = 125 mm, Z = 50 mm, T = -10 to +90, R = 360 continuous